기업의 가치를 창조하는 포엠일렉트로옵틱

포엠일렉트로옵틱의 진보된 기술 ! 그 중심에 고객이 있습니다.
Gener-1300
Chamber Size SUS304, φ1300 mm × 1500 mm (H)
Substrate Dome Four-sectional Dome (or φ1200 mm)
Max. Dome Rotation Speed 30 rpm (Variable)
Crystal Film Thickness Monitor XTC/3 plus 6-point rotary sensor
Evaporation Source One unit of EB source
Performace
Ultimate Pressure 7.0 × 10-5 Pa or lower
Pumping Speed 10 min (from atmospheric pressure to 3.0 × 10-3 Pa)
Max. Substrate Heating Temp. 350℃
Utility Requirements
Installation Space 4500 mm (W) × 6000 mm (D) × 3200 mm (H)
Power Source 3-phase, 200 V, 50/60 Hz, 80 kVA, approx.
Minimum Water Flow 100 /min
Air Pressure 0.5 – 0.7 MPa
Weight 6500kg, approx.
OTFC-1800
Model OTFC-1800CBI/DBI
Vacuum Chamber SUS304, φ1800mm × 1920mm (H)
Substrate Dome Size φ1600mm
Substrate Dome Rotation Speed 10 rpm to 30 rpm (Variable)
Optical Film Thickness Control System HOM2-R-VIS350A High-precision Optical Monitor

· Wavelength range: 350nm to 1100nm

· Reflection/Transmittance
Crystal Film Thickness Monitor XTC/3 plus 6-point rotary sensor
Evaporation Source EB source: 2 units
Ion Source 23 cm RF ion source
Vacuum System Roughing Pump, 2 Diffusion Pumps + Polycold Or 2 Cryo Pumps

*Option: Turbomolecular pump selectable
Performace
Ultimate Pressure 7.0 × 10-5Pa or lower
Pump Down Rate 20 min (Atm. to 1.3 × 10-3Pa)
Substrate Heater 350℃ (max.)
Utility
Layout Dimensions 5700mm (W) × 7700mm (D) × 4000mm (H) approx.
Power Requirements 3-phase, 200V, 50/60Hz, 150kVA approx.
Cooling Water Flow Rate 180 /min or greater
Compressed Air Pressure 0.5MPa or greater
Gross Weight 11200kg approx
OTFC-1550
Model OTFC-1550CBI/DBI
Vacuum Chamber SUS304, φ1550mm × 1800mm (H)
Substrate Dome Size φ1400mm
Substrate Dome Rotation Speed 10 rpm to 30 rpm (Variable)
Optical Film Thickness Control System HOM2-R-VIS350A High-precision Optical Monitor

· Wavelength range: 350nm to 1100nm

· Reflection/Transmittance
Crystal Film Thickness Monitor XTC/3 plus 6-point rotary sensor
Evaporation Source EB source: 2 units
Ion Source 17cm RF Ion Source
Vacuum System Roughing Pump, 2 Diffusion Pumps + Polycold Or 2 Cryo Pumps + Cryo Trap

*Option: Turbomolecular pump selectable
Performace
Ultimate Pressure 7.0 × 10-5Pa or lower
Pump Down Rate 15 minutes (Atm. to 1.3 × 10-3Pa)
Substrate Heater 350℃ (max.)
Utility
Layout Dimensions 5500mm (W) × 7200mm (D) × 3700mm (H) approx.
Power Requirements 3-phase, 200V, 50/60Hz, 120kVA approx.
Cooling Water Flow Rate 180 /min or greater
Compressed Air Pressure 0.5MPa or greater
Gross Weight 10000kg approx
OTFC-1300
Model OTFC-1300CBI/DBI
Vacuum Chamber SUS304, φ1300mm × 1610mm (H)
Substrate Dome Size φ1130mm
Substrate Dome Rotation Speed 10 rpm to 50 rpm (Variable)
Optical Film Thickness Control System HOM2-R-VIS350A High-precision Optical Monitor

· Wavelength range: 350nm to 1100nm

· Reflection/Transmittance
Crystal Film Thickness Monitor XTC/3 plus 6-point rotary sensor
Evaporation Source EB source: 2 units
Ion Source 17cm RF Ion Source
Vacuum System Roughing Pump, 2 Diffusion Pumps + Polycold Or 2 Cryo Pumps + Cryo Trap

*Option: Turbomolecular pump selectable
Performace
Ultimate Pressure 7.0 × 10-5Pa or lower
Pump Down Rate 15 min (Atm. to 1.3 × 10-3Pa)
Substrate Heater 350℃ (max.)
Utility
Layout Dimensions 5000mm (W) × 6500mm (D) × 3500mm (H) approx.
Power Requirements 3-phase, 200V, 50/60Hz, 100kVA approx.
Cooling Water Flow Rate 140 /min or greater
Compressed Air Pressure 0.5MPa or greater
Gross Weight 8500kg approx.
OTFC-900
Model OTFC-900CBI/DBI
Vacuum Chamber SUS304, φ900mm × 1300mm (H)
Substrate Dome Size φ790mm
Substrate Dome Rotation Speed 10 rpm to 30 rpm (Variable)
Optical Film Thickness Control System HOM2-R-VIS350A High-precision Optical Monitor

· Wavelength range: 350nm to 1100nm

· Reflection/Transmittance
Crystal Film Thickness Monitor XTC/3 plus 6-point rotary sensor
Evaporation Source EB source: 2 units
Ion Source 10cm RF Ion Source
Vacuum System Roughing Pump, Diffusion Pump + Polycold Or Cryo Pump + Cryo Trap
Performace
Ultimate Pressure 7.0 × 10-5Pa or lower
Pump Down Rate 15 min (Atm. to 1.3 × 10-3Pa)
Substrate Heater 350℃ (max.)
Utility
Layout Dimensions 4500mm (W) × 5500mm (D) × 3200mm (H) approx.
Power Requirements 3-phase, 200V, 50/60Hz, 80kVA approx.
Cooling Water Flow Rate 80 /min or greater
Compressed Air Pressure 0.5MPa or greater
Gross Weight 5400kg approx.

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